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线宽0.8μm新型印刷电子技术 可低温高速大面积制造服务

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深圳福彩网  技术支持  资料下载线宽0.8μm新型印刷电子技术 可低温高速大面积制造

线宽0.8μm新型印刷电子技术 可低温高速大面积制造

发布时间:2016-07-15 08:16:15 分类:资料下载

 日本在利用印刷方式制作电子元器件的技术方面取得了大幅进步。日本产业技术综合研究所、东京大学、山形大学和田中贵金属工业于2016年4月宣布,开发出了基于新原理的布线印刷技术“SuPR-NaP法”(Surface PhotoReactive Nanometal Printing,表面光反应纳米金属印刷法)。利用这项技术,可同时实现布线宽度等的微细化、大面积化和高速制造。

  与过去常见的喷墨印刷、丝网印刷相比,SuPR-NaP法的布线宽度可以缩小到几十分之一,还能在大型柔性电路板上进行高速印刷。加工温度只要50~80℃,可以使用PET(聚对苯二甲酸乙二酯)等耐热温度较低的树脂作为基材。

  TIANZHONGGUIJINSHUJIANGYISHIYONGGAIJISHUZHIZUODETOUMINGDAODIANMOWEIJICHUZHIZUOCHUMOMIANBANCHUANGANQI,JIHUACONG2017NIAN1YUEKAISHIGONGYINGYANGPIN。

  超越以往的透明导电膜

  CAIYONGXINFANGFAZHIZUODETOUMINGDAODIANMOZAIGUANGTOUSHELVYUBOMODIANZUZHILIANGFANGMIANDOUCHAOYUELECHUANTONGJISHU(TU1)。ZHEISHIYINWEIBUXIANBIANXI,JIEJINKEJIANGUANGDEBOZHANG,SUOYIFANSHELVXIAJIANG,ERQIEBUXIANDEDAODIANXINGGAOYUYIWANGDEYOUMOBUXIAN。


图1:同时实现了高光透射率、低薄膜电阻值的均匀的布线

  (a)SuPR-NaPFAYUXIANZAIDETOUMINGDAODIANMODEGUANGTOUSHELV、BOMODIANZUZHIDEBIJIAO。YUEKAOJINZUOSHANGFANG,TOUMINGDAODIANMODEXINGNENGYUEGAO。SuPR-NaPFAZAIBOMODIANZULVWEI20Ω/□SHI,GUANGTOUSHELVGAODA93%。(b)SHIYONGYIWANGDETUFUFANGFA,HUICHUXIANBUXIANDENGDEBIANYUANJIAOHOUDE“KAFEIZIWENTI”。(c)YONGSuPR-NaPFAJIAGONGRENHEBUXIANKUANDU,BUXIANDEHOUDUDOUJIBENGUDING。 

  BUXIANDAODIANXINGGAOSHIYINWEIZHANGDUFANGXIANGSHANGHOUDUFEICHANGJUNYUN,ERQIEBUXIANJIEMIANDEHOUDUJUNYUN,ZAIKUANDUXIANGTONGDEQINGKUANGXIA,BUXIANDEJIEMIANJIBISHIYONGYIWANGJISHUSHIGENGDA。

  ZHEIYAOGUIGONGYUSuPR-NaPFAJIEJUELEKUNRAOTUFUBUXIANDE“KAFEIZI”WENTI。ZHEISHIYIZHONGTUFUBUJUNWENTI,SHIYINWEIWUFAKONGZHIBUXIANDEHOUDU,ZAIXIANGYAOZENGJIAHOUDUSHI,BUXIANKUANDUBIANDADEXIANXIANG。ERXINJISHUNENGGOUZAI30~100nmDEFANWEINEIKONGZHIBUXIANDEHOUDU。

  兼顾微细化与大面积化

  BUXIANDEWEIXIHUACIQIANJIUYISHIXIAN。CHANZONGYAN2002NIANKAIFACHUDE“Super inkjet(SIJ)FA”KEYIYINSHUAKUANDUWEI1μmZUOYOUDEBUXIAN。DANZHEIZHONGFANGFASHISHIYONGCHAOWEILIANGDEYEDI,ZHUYIHUIZHIWEIXIDEBUXIAN,SHENGCHANSUDUFEICHANGMAN,BUSHIHEYONGLAILIANGCHANDAMIANJIQIJIAN。

  YUZHIXIANGBI,SuPR-NaPFASHITONGGUOBOZHANGWEI172nmDEZIWAIXIAN(UV)PUGUANG,TONGYIHUIZHIBUXIANTUAN,TUFUYOUMOZHIXUSHIYONGGUABANSAOGUOBIAOMIANJIKE,WEIXIHUAYUDAMIANJIHUABINGBUMAODUN,ZHIZUODAMIANJIQIJIANSHISUDUYEHENKUAI(TU2)。YANJIURENYUANCICISHIZHILE8YINGCUN(YUE200mm)DECHUMOMIANBANCHUANGANQI。BOZHANG172nmDEUVPUGUANGSHEBEIKEYICAIYONGSHIMIANSHANGYONGLAIQINGCHUYEJINGMIANBANBIAOMIANYOUJIWUDE“UVCHULIQI”,ZHIZAOSHEBEIDECAIGOUCHENGBENYEBIJIAODI。


图2:用刮板扫过表面即可完成印刷

  SuPR-NaPFATUFUGONGYIDEGAIYAO。SHOUXIAN,ZAIPETHEPENDENGJICAISHANGTUFUHANFUJUHEWU。CONGGUANGYANMODESHANGMIANZHAOSHEUV,SHAOZHIBUXIANTUAN。RANHOUSHIYONGGUABANTUFUYINNAMIYOUMO,ZHIYOUBUXIANTUANSHANGHUILIUXIAYINNAMIYOUMO,XINGCHENGBUXIAN。

  利用保护基结合力的差别

  XINJISHUNENGGOUSHIXIANZHEIYITUPO,SHIYINWEIYINSHUASHIZAIYIWANGDEQINSHUKONGZHIDEJICHUSHANG,CAIYONGLEXUANZEXINGHUAXUEXIFUYINMOSHUIDEJISHU,SHIMOSHUIGUDINGZAIHUIZHIHAOBUXIANTUANDEJICAISHANG(TU3)。


图3:通过化学方法,将银纳米油墨固定在基材上

  SuPR-NaPFASHIYINNAMIYOUMOFUZHEZAIJICAISHANGDEYUANLI。XIANGHANFUJUHEWUZHAOSHEUVHOU,BIAOMIANHUIXINGCHENGDALIANGDESUOJI。YIWANJIANWEIBAOHUJIDEYINNAMILIZIYUZHEILIJIECHUHOU,YUYINJIEHELIGENGQIANGDESUOJIJIANGZHIHUANWANJIAN,XIFUZHUYIN。

  QINSHUKONGZHISHIZHISHIJICAIBIAOMIANSHANGYOUBUXIANTUANDEBUFENQINSHUIXINGGAO,MEIYOUTUANDEBUFENSHUSHUIXINGGAODEKONGZHIJISHU。GUOQUDEFANGFADADUOSHIZHIJIANGYOUMO“FANGZAI”QINSHUIXINGGAODEBUFEN,ZAIKONGZHIBUXIANHOUDU、SUOXIAOBUXIANKUANDUSHANGCUNZAIXIANZHI。ERQIE,YINYUJICAIZHIJIANDEZHANZHEXINGCHA,ZAIWANQUHELASHENJICAISHI,BUXIANYOUKENENGCONGJICAISHANGBOLUO。

  ERXINFANGFASHIXIANZAIJICAISHANGTUFUBOBODEYICENGHANFUJUHEWU,RANHOUTONGGUOUVPUGUANGHUIZHITUAN。ZAIJINGGUOPUGUANGDEHANFUJUHEWUDEBIAOMIAN,HUICHUXIANDALIANGDESUOJI。MEIYOUPUGUANGDEBIAOMIANSHUSHUIXINGGAO,ZAIJINGGUOPUGUANGHOU,SHUSHUIXINGHUILVEYOUXIAJIANG。

  CAIYONGDEYINMOSHUIYOUSHANXINGDAXUEDELIYUANZHENGRENJIAOSHOUKAIFA,TIANZHONGGUIJINSHUZHENGZAITUIJINCHANPINHUA,ZHEIZHONGMOSHUIZAIZHIJINGYUEWEI13nmDEYINNAMILIZIWAIBAOGUOLEWANJIANBAOHUJI。BAOHUJIDEZUOYONGSHIFANGZHIYINNAMILIZININGJI,GUOQUDEYINMOSHUIDADUOSHIYONGYUYINJIEHELIQIANGDESUOJI。DANZHENGYINWEIJIEHELIQIANG,ZAITUFUYINMOSHUIZHIHOU,XUYAOTIGAOTUIHUOWENDUCAINENGQUCHUBAOHUJI。

  ERWANJIANYUYINNAMILIZIDEJIEHELIRUO,ZAITUFUHOUKEYIBEIHANFUJUHEWUSHANGDESUOJIZHIHUAN,SHIYINNAMILIZIGUDINGZAIJICAISHANG。ZHUDAOBENCIJISHUKAIFADECHANZONGYANROUXINGDIANZIYANJIUZHONGXINZONGYANJIUZHUGUAN、DONGJINGDAXUEYANJIUSHENGYUANGONGXUEXIYANJIUKEWULIGONGCHENGZHUANYEDEJIAOSHOUZHANGGUCHUANDAFUSHUO:“GUDINGDEZHANZHELISHIDAQIYADE50BEI、JI5MPaYISHANG,JISHIYI1mmDEQULVBANJINGWANQU100CIYEBUHUIBOLUO。”

  CAIYONGXINJISHUHOU,“KAFEIZI”BUZAICHANSHENG。YINNAMILIZIZHIJIANDEWANJIANHUIZAIJIAREDAOYUE50~80℃SHITUOLUO,ERYUANLAIDETUIHUOWENDUYAOZAI100℃YISHANG。

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